The development of this ion implanter was started with installation and test of its duoplasmatron ion source in 1993, followed by continuous upgrading. This completely homemade machine is equipped with the high-current duoplasmatron ion source, a 150-kV high-voltage generator, a 150-kV accelerating tube, a magnetic beam scanner, a 0.2-m3 target chamber and two diffusion pumps. As a non-mass-analyzed ion implanter, it can produce high beam current (up to mA). The beam focusing/defocusing cooperated with beam scanning is able to implant target with homogeneous large-area (10x10 cm2) beams. Inside the target chamber, there is a 2-D rotatable, vertically translatable and water-cooled sample station. The ion implanter has been our main working horse for industrial ion implantation and biotechnological application.
Built by: ourselves
Start of operation: around 1998
Terminal voltage: 150 kV
Beam current: order of mA in maximum
Ion source: duoplasmatron
Kinds of ions: gaseous ions, particularly nitrogen and argon